发明授权
- 专利标题: PBN container and method for producing PBN container
- 专利标题(中): PBN容器和生产PBN容器的方法
-
申请号: US11239388申请日: 2005-09-30
-
公开(公告)号: US07682451B2公开(公告)日: 2010-03-23
- 发明人: Noboru Kimura , Takuma Kushihashi
- 申请人: Noboru Kimura , Takuma Kushihashi
- 申请人地址: JP Tokyo
- 专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff & Berridge, PLC
- 优先权: JP2004-296012 20041008
- 主分类号: C30B35/00
- IPC分类号: C30B35/00
摘要:
There is disclosed a PBN container in which a conductive film is deposited on a surface of a body formed by depositing PBN (pyrolytic boron nitride), wherein, at least, an angle between a PBN cut face of the body and at least one wall surface adjacent to the PBN cut face is 20°-80°, and a method for producing a PBN (pyrolytic boron nitride) container comprising at least steps of depositing PBN to form a body, processing a PBN cut face of the formed body so that at least, an angle between the PBN cut face and at least one wall surface adjacent to the PBN cut face is 20°-80°, and coating a surface of the processed body with a conductive film. Thus, there can be provided a PBN container excellent in durability where a conductive film is laminated on a surface of a body formed by depositing PBN, and a method for producing the PBN container.
公开/授权文献
- US20070231235A1 PBN container and method for producing PBN container 公开/授权日:2007-10-04