Invention Grant
US07682758B2 Reflection mask for EUV photolithography and method of fabricating the reflection mask
有权
用于EUV光刻的反射掩模和制造反射掩模的方法
- Patent Title: Reflection mask for EUV photolithography and method of fabricating the reflection mask
- Patent Title (中): 用于EUV光刻的反射掩模和制造反射掩模的方法
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Application No.: US11441835Application Date: 2006-05-26
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Publication No.: US07682758B2Publication Date: 2010-03-23
- Inventor: Suk-pil Kim , I-hun Song , Young-soo Park , Seung-hyuk Chang , Hoon Kim
- Applicant: Suk-pil Kim , I-hun Song , Young-soo Park , Seung-hyuk Chang , Hoon Kim
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics, Co., Ltd.
- Current Assignee: Samsung Electronics, Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: F. Chau & Associates, LLC.
- Priority: KR10-2005-0045218 20050527
- Main IPC: G03F1/00
- IPC: G03F1/00

Abstract:
A reflection mask for extreme ultraviolet (EUV) photolithography and a method of fabricating the same, in which the reflection mask includes a substrate, a lower reflection layer formed in a multi-layer structure on the substrate and including a material reflecting EUV light, an upper reflection layer formed in a multi-layer structure on the lower reflection layer and reflecting EUV light, and a phase reversing layer formed between the lower reflection layer and the upper reflection layer in a certain pattern and causing destructive interference between reflection light from the upper reflection layer and reflection light from the lower reflection layer. An incidence of a shadow effect can be reduced and unnecessary EUV light can be eliminated, so that a pattern on the reflection mask can be projected precisely on a silicon wafer. Since the phase reversing layer includes the same material as the reflection layer and an absorption layer, mask fabrication processes can be handled easily.
Public/Granted literature
- US20060281017A1 Reflection mask for EUV photolithography and method of fabricating the reflection mask Public/Granted day:2006-12-14
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