发明授权
- 专利标题： Method of manufacturing semiconductor laser device including light shield plate
- 专利标题（中）： 制造包括遮光板的半导体激光装置的方法
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申请号： US11889121申请日： 2007-08-09
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公开(公告)号： US07682852B2公开(公告)日： 2010-03-23
- 发明人: Han-youl Ryu , Kyoung-ho Ha , Youn-joon Sung
- 申请人： Han-youl Ryu , Kyoung-ho Ha , Youn-joon Sung
- 申请人地址： KR Gyeonggi-do
- 专利权人： Samsung Led Co., Ltd.
- 当前专利权人： Samsung Led Co., Ltd.
- 当前专利权人地址： KR Gyeonggi-do
- 代理机构： Harness, Dickey & Pierce, P.L.C.
- 优先权： KR10-2006-0105042 20061027
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
Provided is a method of manufacturing a semiconductor laser device having a light shield film comprising: forming a light emission structure by depositing a first clad layer, an active layer and a second clad layer on a substrate; depositing a light shield film and a protection film on the light emission face of the light emission structure; removing the light shield film corresponding to an area of the light emission face of the light emission structure including and above the first clad layer; and removing the protection layer.
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