A fluorine-containing polyether phosphonic acid ester compound represented by the following general formula: (R2O)(R1O)P(O)(CH2)aCF(CF3)[OCF2CF(CF3)]bO(CF2)CO[CF(CF3)CF2O]dCF(CF3)(CH2)eP(O)(OR3)(OR4) (where R1, R2, R3 and R4 are hydrogen atoms, alkyl groups, cycloalkyl groups, aryl groups, alkylaryl groups, aralkyl groups, or any of the foregoing groups substituted with halogen atoms, and subscripts a, b, c, d, and e are in conditions of 2≦a+e≦8, b+d≦28, and 1≦c≦10, and subscripts b and d may be 0). The fluorine-containing polyether phosphonic acid ester compound is produced by reaction of a fluorine-containing polyether dialkyl halide represented by the following general formula: X(CH2)aCF(CF3)[OCF2CF(CF3)]bO(CF2)cO[CF(CF3)CF2O]dCF(CF3)(CH2)eX (X: Cl, Br or I)with a phosphite compound represented by the following general formula: (R1O)(R2O)P(OR) and/or (R3O)(R4O)P(OR) (R: a hydrogen atom or a lower alkyl group).