发明授权
- 专利标题: Structure for capacitive balancing of integrated relative humidity sensor
- 专利标题(中): 集成式相对湿度传感器的电容平衡结构
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申请号: US11977799申请日: 2007-10-26
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公开(公告)号: US07683636B2公开(公告)日: 2010-03-23
- 发明人: Yousef M. Alimi , Richard A. Davis
- 申请人: Yousef M. Alimi , Richard A. Davis
- 申请人地址: US NJ Morristown
- 专利权人: Honeywell International Inc.
- 当前专利权人: Honeywell International Inc.
- 当前专利权人地址: US NJ Morristown
- 代理商 Kermit D. Lopez; Luis M. Ortiz
- 主分类号: G01R27/26
- IPC分类号: G01R27/26 ; H01G5/012
摘要:
An improved relative humidity sensor apparatus that provides a more accurate measurement of humidity in the presence of water condensation. A series capacitive sensor includes a thin porous platinum top plate, a humidity sensitive polyimide dielectric, and two metal bottom plates on a semiconductor substrate. The two capacitors can be wired in series such that the metal bottom plates form independent, electrically driven connections. The thin top layer can form a top plate. Changes in humidity affect the humidity sensitive dielectric thereby causing changes in the capacitive value. A P-well layer and a P-plus layer can be added at the perimeter of the substrate to create a path for a parasitic capacitance caused by water condensation to connect to one or more connection nodes, thereby preventing erroneous measurements of humidity in the presence of water condensation.