发明授权
- 专利标题: Compatible MEMS switch architecture
- 专利标题(中): 兼容MEMS开关架构
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申请号: US11591809申请日: 2006-11-02
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公开(公告)号: US07684106B2公开(公告)日: 2010-03-23
- 发明人: Jeffrey B. Sampsell
- 申请人: Jeffrey B. Sampsell
- 申请人地址: US CA San Diego
- 专利权人: QUALCOMM MEMS Technologies, Inc.
- 当前专利权人: QUALCOMM MEMS Technologies, Inc.
- 当前专利权人地址: US CA San Diego
- 代理机构: Knobbe Martens Olson & Bear, LLP
- 主分类号: G02B26/00
- IPC分类号: G02B26/00
摘要:
A method of fabricating a display device includes forming a switch and forming a plurality of display elements in parallel electrical communication with the switch. The switch includes an electrode, a first contact, and a second contact. The switch is responsive to voltages applied to the electrode to selectively place the first contact and the second contact in communication with one another. Forming the switch includes a first set of patterning steps. Forming the plurality of display elements includes a second set of patterning steps. The second set of patterning steps includes the first set of patterning steps.
公开/授权文献
- US20080121503A1 Compatible MEMS switch architecture 公开/授权日:2008-05-29
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