发明授权
US07690325B2 Method and apparatus for depositing material onto a surface 失效
用于将材料沉积到表面上的方法和设备

Method and apparatus for depositing material onto a surface
摘要:
Some embodiments of the present invention provide an apparatus and method in which material is deposited upon a surface from an elongated beam having an aperture defined therein through which the material is moved by passive adsorption. The elongated beam can be substantially planar along substantially its entire length, can be oriented at an acute angle with respect to the surface during deposition processes, and can have a length no greater than about 2 mm. In some embodiments, the aperture can be elongated, can extend from a material reservoir to a location short of the terminal end of the elongated beam or through the terminal end of the elongated beam, and can have a portion extending through the thickness of the elongated beam.
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