发明授权
US07690912B2 Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same 有权
图案转印模具,图案转印装置和使用其的装置制造方法

Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same
摘要:
One object of the present invention is to provide a pattern transferring mold which can provide a starting area of mold release easily and certainly and a pattern transferring apparatus with the same. A pattern transferring mold is disclosed which is used in a pattern transferring apparatus that brings the mold into contact with a photo-curing resin on a substrate and cures the photo-curing resin by light irradiation to transfer a pattern formed on the mold onto the photo-curing resin. The mold comprises a bottom face which contacts the photo-curing resin, the bottom face portion including a first area in which the pattern is formed and a second area formed outside the first area. The mold has a mold-releasing shape in the second area, the mold-releasing shape providing a starting area of mold release from the cured photo-curing resin.
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