Invention Grant
- Patent Title: MEMS switch with improved standoff voltage control
- Patent Title (中): 具有改进的隔离电压控制的MEMS开关
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Application No.: US11962178Application Date: 2007-12-21
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Publication No.: US07692519B2Publication Date: 2010-04-06
- Inventor: William James Premerlani , Christopher Fred Keimel , Kanakasabapathi Subramanian , Xuefeng Wang , Marco Francesco Aimi
- Applicant: William James Premerlani , Christopher Fred Keimel , Kanakasabapathi Subramanian , Xuefeng Wang , Marco Francesco Aimi
- Applicant Address: US NY Niskayuna
- Assignee: General Electric Company
- Current Assignee: General Electric Company
- Current Assignee Address: US NY Niskayuna
- Agent Richard D. Emery
- Main IPC: H01P1/10
- IPC: H01P1/10 ; H01H57/00

Abstract:
A MEMS switch is provided including a substrate, a movable actuator coupled to the substrate and having a first side and a second side, a first fixed electrode coupled to the substrate and positioned on the first side of the movable actuator to generate a first actuation force to pull the movable actuator toward a conduction state, and a second fixed electrode coupled to the substrate and positioned on the second side of the movable actuator to generate a second actuation force to pull the movable actuator toward a non-conducting state.
Public/Granted literature
- US20090160584A1 MEMS SWITCH WITH IMPROVED STANDOFF VOLTAGE CONTROL Public/Granted day:2009-06-25
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