Invention Grant
US07692519B2 MEMS switch with improved standoff voltage control 有权
具有改进的隔离电压控制的MEMS开关

MEMS switch with improved standoff voltage control
Abstract:
A MEMS switch is provided including a substrate, a movable actuator coupled to the substrate and having a first side and a second side, a first fixed electrode coupled to the substrate and positioned on the first side of the movable actuator to generate a first actuation force to pull the movable actuator toward a conduction state, and a second fixed electrode coupled to the substrate and positioned on the second side of the movable actuator to generate a second actuation force to pull the movable actuator toward a non-conducting state.
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