Invention Grant
US07695873B2 Method and apparatus for producing color filter with a line-scan exposure technology by high-speed shutter control 有权
通过高速快门控制用线扫描曝光技术生产滤色镜的方法和装置

Method and apparatus for producing color filter with a line-scan exposure technology by high-speed shutter control
Abstract:
A method and apparatus for producing a color filter is disclosed. It mainly uses an exposure apparatus which can produce a plurality of exposure light sources to do an exposure process. Through fast controlling the on/off time of the plurality of exposure light sources as well as making a relative moving between the plurality of exposure light sources and a substrate plane, a color photoresist layer on the substrate plane can be exposed to form a pattern thereon, wherein the on/off time of the exposure light sources are respectively controlled by a plurality of shutters of the exposure apparatus. Then, with a developing process to the exposed color photoresist layer, a color layer is formed on the substrate plane. The main advantage of the invention is that photo-mask is not needed in the exposure process and any size substrate plane can be handled by the present exposure apparatus.
Information query
Patent Agency Ranking
0/0