发明授权
- 专利标题： Interferometer system for and a method of determining a surface characteristic by modifying surface height data using corresponding amplitude data
- 专利标题（中）： 干涉仪系统和通过使用对应的振幅数据修改表面高度数据来确定表面特性的方法
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申请号： US11260072申请日： 2005-10-26
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公开(公告)号： US07697726B2公开(公告)日： 2010-04-13
- 发明人: Daniel Ian Mansfield , Andrew Douglas Bankhead
- 申请人： Daniel Ian Mansfield , Andrew Douglas Bankhead
- 申请人地址： GB Leicester
- 专利权人： Taylor Hobson Limited
- 当前专利权人： Taylor Hobson Limited
- 当前专利权人地址： GB Leicester
- 代理机构： RatnerPrestia
- 优先权： GB0502677.8 20050209
- 主分类号： G06K9/00
- IPC分类号： G06K9/00
摘要：
An interferometer system (2) directs light along a sample path (SP) towards a sample surface (7) and along a reference path (RP) towards a reference surface (6). Light reflected by a sample surface region and by the reference surface interfere. Sensing elements (SE) sense interference fringes at intervals along a scan path to provide a set of intensity data. A coherence peak position determiner (201) determines from the intensity data set a position on the scan path that corresponds to the height of the surface region. An amplitude determiner (202) determines amplitude data representing the amplitude of the intensity data at the determined height position. A modified surface height calculator (207) calculates modified height data by modifying the height data by a correction factor determined using the corresponding amplitude data and a correction parameter provided by a correction parameter provider (260).
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