Invention Grant
US07697829B1 Electronic damping for stage positioning 有权
舞台定位的电子阻尼

Electronic damping for stage positioning
Abstract:
Systems and techniques for electro-magnetic damping in a stage system. An excitation waveform for one or more actuators includes one or more frequency components with associated amplitudes. Frequency components at a resonance frequency of the stage system have associated amplitudes that are substantially zero.
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