发明授权
US07699480B2 High positioning reproducible low torque mirror-actuator interface
有权
高定位可重复的低扭矩镜面致动器接口
- 专利标题: High positioning reproducible low torque mirror-actuator interface
- 专利标题(中): 高定位可重复的低扭矩镜面致动器接口
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申请号: US12341597申请日: 2008-12-22
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公开(公告)号: US07699480B2公开(公告)日: 2010-04-20
- 发明人: Herman Soemers , Franciskus Hendrikus van Deuren , Hendrik Dirk Visser , Sander C. Broers
- 申请人: Herman Soemers , Franciskus Hendrikus van Deuren , Hendrik Dirk Visser , Sander C. Broers
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: DE Oberkochen
- 代理机构: Darby & Darby P.C.
- 主分类号: G02B7/182
- IPC分类号: G02B7/182
摘要:
The present high positioning reproducible mirror-actuator interface disclosed herein overcomes the deficiencies associated with conventional interface systems and offer a number of advantages that are disclosed herein. Generally, the mirror mounts provide a reliable and robust interface between the mirrors and actuators, that serve to move and position the mirrors, as wells as providing an interface between the mirrors and gravity compensator pins. The mirror mount is characterized as having a body that has an outer peripheral wall that includes a plurality of flexible elements around the perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane. The body is open at the first end to allow flexing of the flexible elements. The flexible elements providing a direct coupling interface between the mirror mount and the mirror. The flexible elements of the mirror mount provides a number of advantages and increases the performance capabilities of the first mechanical interface between the mirror mount and the actuator.
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