发明授权
- 专利标题: Wiring structure and method for manufacturing the same
- 专利标题(中): 接线结构及其制造方法
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申请号: US10558367申请日: 2004-05-28
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公开(公告)号: US07701060B2公开(公告)日: 2010-04-20
- 发明人: Munehiro Tada , Yoshihiro Hayashi , Yoshimichi Harada , Fuminori Ito , Hiroto Ohtake , Tatsuya Usami
- 申请人: Munehiro Tada , Yoshihiro Hayashi , Yoshimichi Harada , Fuminori Ito , Hiroto Ohtake , Tatsuya Usami
- 申请人地址: JP Tokyo JP Kanagawa
- 专利权人: NEC Corporation,NEC Electronics Corporation
- 当前专利权人: NEC Corporation,NEC Electronics Corporation
- 当前专利权人地址: JP Tokyo JP Kanagawa
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2003-152743 20030529
- 国际申请: PCT/JP2004/007791 WO 20040528
- 国际公布: WO2004/107434 WO 20041209
- 主分类号: H01L23/48
- IPC分类号: H01L23/48
摘要:
There are provided with a wiring structure and a method for manufacturing the same wherein in a wiring structure of multi-layered wiring in which a metal wiring is formed on a substrate forming a semiconductor element thereby obtaining connection of the element, no damage to insulation property between the abutting wirings by occurrence of leakage current and no deterioration of insulation resistance property between the abutting wirings are achieved in case that fine metal wiring is formed in a porous insulation film. The insulation barrier layer 413 is formed between an interlayer insulation film and the metal wiring, in the metal wiring structure on the substrate forming the semiconductor element. The insulation barrier layer enables to reduce leakage current between the abutting wirings and to elevate the insulation credibility.
公开/授权文献
- US20070013069A1 Wiring structure and method for manufacturing the same 公开/授权日:2007-01-18
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