- 专利标题: Apparatus and method for fabricating bonded substrate
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申请号: US11254712申请日: 2005-10-21
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公开(公告)号: US07704348B2公开(公告)日: 2010-04-27
- 发明人: Takanori Muramoto , Takuya Ohno , Tsukasa Adachi , Koji Hashizume , Yosimasa Miyajima , Takao Kojima
- 申请人: Takanori Muramoto , Takuya Ohno , Tsukasa Adachi , Koji Hashizume , Yosimasa Miyajima , Takao Kojima
- 申请人地址: JP Kawasaki
- 专利权人: Fujitsu Limited
- 当前专利权人: Fujitsu Limited
- 当前专利权人地址: JP Kawasaki
- 代理机构: Staas & Halsey LLP
- 优先权: JP2002-076173 20020319
- 主分类号: B32B37/00
- IPC分类号: B32B37/00
摘要:
A bonded-substrate fabricating apparatus capable of reducing defective bonded substrates fabricated. A transfer robot sucks the outer edge area of the bottom surface of a substrate and spouts gas toward the bottom surface of the substrate to carry the substrate into a vacuum process chamber of a press machine while keeping the substrate horizontally. A press plate holds the substrate, which is held by the transfer robot, by suction.
公开/授权文献
- US20060048896A1 Apparatus and method for fabricating bonded substrate 公开/授权日:2006-03-09
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