发明授权
- 专利标题: Laser induced thermal imaging apparatus and laser induced thermal imaging method
- 专利标题(中): 激光诱导热成像设备和激光诱导热成像方法
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申请号: US11509463申请日: 2006-08-23
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公开(公告)号: US07704666B2公开(公告)日: 2010-04-27
- 发明人: Sok Won Noh , Tae Min Kang , Jin Soo Kim , Noh Min Kwak , Jae Ho Lee
- 申请人: Sok Won Noh , Tae Min Kang , Jin Soo Kim , Noh Min Kwak , Jae Ho Lee
- 申请人地址: KR Yongin
- 专利权人: Samsung Mobile Display Co., Ltd.
- 当前专利权人: Samsung Mobile Display Co., Ltd.
- 当前专利权人地址: KR Yongin
- 代理机构: Christie, Parker & Hale, LLP
- 优先权: KR10-2005-0080338 20050830
- 主分类号: G03C8/00
- IPC分类号: G03C8/00 ; G03C1/00
摘要:
A laser induced thermal imaging apparatus and a laser induced thermal imaging method. A laser induced thermal imaging apparatus has electromagnets in an adhesion frame and a substrate stage to closely adhere a donor film to a substrate. The laser induced thermal imaging apparatus includes a process chamber including a donor film and a substrate, and adapted to carry out a process for depositing the donor film on the substrate; a substrate stage having a first electromagnet, and positioned in the process chamber to support the substrate; an adhesion frame having a second electromagnet, and positioned over the substrate stage, wherein the donor film and the substrate are disposed between the substrate stage and the adhesion frame in the process chamber; and a laser oscillator adapted to apply a laser output to the donor film.
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