发明授权
US07704666B2 Laser induced thermal imaging apparatus and laser induced thermal imaging method 有权
激光诱导热成像设备和激光诱导热成像方法

Laser induced thermal imaging apparatus and laser induced thermal imaging method
摘要:
A laser induced thermal imaging apparatus and a laser induced thermal imaging method. A laser induced thermal imaging apparatus has electromagnets in an adhesion frame and a substrate stage to closely adhere a donor film to a substrate. The laser induced thermal imaging apparatus includes a process chamber including a donor film and a substrate, and adapted to carry out a process for depositing the donor film on the substrate; a substrate stage having a first electromagnet, and positioned in the process chamber to support the substrate; an adhesion frame having a second electromagnet, and positioned over the substrate stage, wherein the donor film and the substrate are disposed between the substrate stage and the adhesion frame in the process chamber; and a laser oscillator adapted to apply a laser output to the donor film.
信息查询
0/0