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US07705422B2 Semiconductor device including metal-insulator-metal capacitor arrangement 失效
半导体器件包括金属 - 绝缘体 - 金属电容器布置

Semiconductor device including metal-insulator-metal capacitor arrangement
摘要:
A semiconductor device has a semiconductor substrate, a multi-layered wiring construction formed over the semiconductor device, and a metal-insulator-metal (MIM) capacitor arrangement established in the multi-layered wiring construction. The MIM capacitor arrangement includes first, second, third, fourth, fifth, and sixth electrode structures, which are arranged in order in parallel with each other at regular intervals. The first, second, fifth and sixth electrode structures are electrically connected to each other so as to define a first capacitor, and the third and fourth electrode structures are electrically connected to each other so as to define a second capacitor.
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