发明授权
US07705422B2 Semiconductor device including metal-insulator-metal capacitor arrangement
失效
半导体器件包括金属 - 绝缘体 - 金属电容器布置
- 专利标题: Semiconductor device including metal-insulator-metal capacitor arrangement
- 专利标题(中): 半导体器件包括金属 - 绝缘体 - 金属电容器布置
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申请号: US11247296申请日: 2005-10-12
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公开(公告)号: US07705422B2公开(公告)日: 2010-04-27
- 发明人: Masayuki Furumiya , Kuniko Kikuta , Ryota Yamamoto , Makoto Nakayama
- 申请人: Masayuki Furumiya , Kuniko Kikuta , Ryota Yamamoto , Makoto Nakayama
- 申请人地址: JP Kanagawa
- 专利权人: NEC Electronics Corporation
- 当前专利权人: NEC Electronics Corporation
- 当前专利权人地址: JP Kanagawa
- 代理机构: Young & Thompson
- 优先权: JP2004-307664 20041022
- 主分类号: H01L29/00
- IPC分类号: H01L29/00
摘要:
A semiconductor device has a semiconductor substrate, a multi-layered wiring construction formed over the semiconductor device, and a metal-insulator-metal (MIM) capacitor arrangement established in the multi-layered wiring construction. The MIM capacitor arrangement includes first, second, third, fourth, fifth, and sixth electrode structures, which are arranged in order in parallel with each other at regular intervals. The first, second, fifth and sixth electrode structures are electrically connected to each other so as to define a first capacitor, and the third and fourth electrode structures are electrically connected to each other so as to define a second capacitor.
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