Invention Grant
US07705994B2 Monolithic displacement measuring interferometer with spatially separated but substantially equivalent optical pathways and optional dual beam outputs 有权
单片位移测量干涉仪,具有空间分离但基本相同的光学路径和可选的双光束输出

  • Patent Title: Monolithic displacement measuring interferometer with spatially separated but substantially equivalent optical pathways and optional dual beam outputs
  • Patent Title (中): 单片位移测量干涉仪,具有空间分离但基本相同的光学路径和可选的双光束输出
  • Application No.: US11286817
    Application Date: 2005-11-23
  • Publication No.: US07705994B2
    Publication Date: 2010-04-27
  • Inventor: Alan B Ray
  • Applicant: Alan B Ray
  • Applicant Address: US CA Santa Clara
  • Assignee: Agilent Technologies, Inc.
  • Current Assignee: Agilent Technologies, Inc.
  • Current Assignee Address: US CA Santa Clara
  • Main IPC: G01B9/02
  • IPC: G01B9/02
Monolithic displacement measuring interferometer with spatially separated but substantially equivalent optical pathways and optional dual beam outputs
Abstract:
An interferometer and corresponding system are provided having several aspects. In a first aspect, there is provided an interferometer adapted to receive separate first and second beams f1 and f2 therein, the interferometer comprising substantially equivalent and separate first and second optical pathways for the first and second beams f1 and f2. In a second aspect, there is provided an interferometer adapted to receive as separate inputs therein first and second beams f1 and f2, where such beams are not mixed or combined until just prior to being output by the interferometer. In a third aspect, an interferometer is provided having one or more beam blockers for intercepting extraneous or undesired light, and keeping such light from contaminating or interfering with separate beams f1 and f2.
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