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US07706043B2 Device for confocal illumination of a specimen 有权
试样共聚焦照明装置

Device for confocal illumination of a specimen
Abstract:
A device for confocal observation of a specimen, having a mask, which is located in the illumination beam path and the image beam path and is rotatable around a central axis, the mask being provided with openings for generating an illumination pattern moving on the specimen, an arrangement of a plurality of focusing microoptics which is adjusted to the geometric arrangement of the openings of the mask and to the rotation of the mask in order to concentrate the illumination light by each of the microoptics into a respective one of the openings of the mask, and a beam splitter for separating light from the specimen from illumination light, wherein the beam splitter is arranged in the beam path between the mask and the arrangement of the microoptics, and wherein an optical arrangement is provided in the beam path between the mask and the arrangement of the microoptics.
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