Invention Grant
- Patent Title: Optical interference display cell and method of making the same
- Patent Title (中): 光干涉显示单元及其制作方法
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Application No.: US11413603Application Date: 2006-04-28
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Publication No.: US07706044B2Publication Date: 2010-04-27
- Inventor: Wen-Jian Lin , Hsiung-Kuang Tsai
- Applicant: Wen-Jian Lin , Hsiung-Kuang Tsai
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: TW92114188A 20030526
- Main IPC: G02F1/03
- IPC: G02F1/03 ; G02B26/00
Abstract:
An optical interference display cell is described. A first electrode and a sacrificial layer are sequentially formed on a transparent substrate and at least two openings are formed in the first electrode and the sacrificial layer to define a position of the optical interference display cell. An insulated heat-resistant inorganic supporter is formed in each of the openings. A second electrode is formed on the sacrificial layer and the supporters. Finally, a remote plasma etching process is used for removing the sacrificial layer.
Public/Granted literature
- US20060257070A1 Optical interference display cell and method of making the same Public/Granted day:2006-11-16
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