发明授权
US07709179B2 Negative resist composition and method for forming resist pattern
有权
负型抗蚀剂组合物和形成抗蚀剂图案的方法
- 专利标题: Negative resist composition and method for forming resist pattern
- 专利标题(中): 负型抗蚀剂组合物和形成抗蚀剂图案的方法
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申请号: US11909071申请日: 2006-04-07
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公开(公告)号: US07709179B2公开(公告)日: 2010-05-04
- 发明人: Jun Iwashita
- 申请人: Jun Iwashita
- 申请人地址: JP Kawasaki-shi
- 专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址: JP Kawasaki-shi
- 代理机构: Knobbe, Martens, Olson & Bear, LLP
- 优先权: JP2005-122711 20050420
- 国际申请: PCT/JP2006/307421 WO 20060407
- 国际公布: WO2006/115010 WO 20061102
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/30
摘要:
A chemically amplified negative resist composition is provided in addition to a method of forming a resist pattern from which a desirable pattern shape can be obtained. A negative resist composition in which a resin component (A) contains a resin component (A1) having a structural unit (a1) containing an alicyclic group having a fluorinated hydroxyalkyl group and a structural unit (a2) derived from an acrylic acid ester and containing a hydroxyl group-containing alicyclic group; and an acid generator component (B) contains an acid generator (B1) expressed by the following general formula (B1): (where R51 represents a straight chain, branched chain or cyclic alkyl group or a fluorinated alkyl group; R52 represents a hydrogen atom, hydroxyl group, halogen atom, straight chain, branched chain or cyclic alkyl group, straight chain or branched chain halogenated alkyl group, or straight chain or branched chain alkoxy group; R53 represents an aryl group which may have a substituent; and n represents an integer of 1 to 3).
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