发明授权
US07709279B2 Methods for testing semiconductor devices methods for protecting the same from electrostatic discharge events during testing, and methods for fabricating inserts for use in testing semiconductor devices 有权
用于测试半导体器件的方法,用于在测试期间保护其免受静电放电事件的方法,以及用于制造用于测试半导体器件的插入件的方法

  • 专利标题: Methods for testing semiconductor devices methods for protecting the same from electrostatic discharge events during testing, and methods for fabricating inserts for use in testing semiconductor devices
  • 专利标题(中): 用于测试半导体器件的方法,用于在测试期间保护其免受静电放电事件的方法,以及用于制造用于测试半导体器件的插入件的方法
  • 申请号: US10827806
    申请日: 2004-04-20
  • 公开(公告)号: US07709279B2
    公开(公告)日: 2010-05-04
  • 发明人: David R. HembreeSalman Akram
  • 申请人: David R. HembreeSalman Akram
  • 申请人地址: US ID Boise
  • 专利权人: Micron Technology, Inc.
  • 当前专利权人: Micron Technology, Inc.
  • 当前专利权人地址: US ID Boise
  • 代理机构: TraskBritt
  • 主分类号: H01L21/66
  • IPC分类号: H01L21/66 H01L23/58
Methods for testing semiconductor devices methods for protecting the same from electrostatic discharge events during testing, and methods for fabricating inserts for use in testing semiconductor devices
摘要:
An apparatus and method for providing external electrostatic discharge (ESD) protection to a semiconductor device, which may or may not include its own ESD protection, are provided. An ESD structure may be associated with each interconnect, either individually or shared between two or more interconnects. Each interconnect includes a contact tip for establishing a temporary electrical connection with a bond pad of the semiconductor device and a contact pad for electrically interfacing the bond pad with external burn-in and/or test equipment. The ESD structure may be implemented, for example, as a fusible element or a shunting element, such as a pair of diodes, a diode-resistor network, or a pair of transistors. The interconnect may be employed as part of an insert including a plurality of interconnects that provides ESD protection to a plurality of integrated circuits of at least one semiconductor device.
信息查询
0/0