发明授权
- 专利标题: Device structures for active devices fabricated using a semiconductor-on-insulator substrate and design structures for a radiofrequency integrated circuit
- 专利标题(中): 使用绝缘体上半导体衬底制造的有源器件的器件结构和用于射频集成电路的设计结构
-
申请号: US12108924申请日: 2008-04-24
-
公开(公告)号: US07709926B2公开(公告)日: 2010-05-04
- 发明人: Wagdi W. Abadeer , Kiran V. Chatty , Robert J. Gauthier , Jed H. Rankin , Robert R. Robison , William R. Tonti
- 申请人: Wagdi W. Abadeer , Kiran V. Chatty , Robert J. Gauthier , Jed H. Rankin , Robert R. Robison , William R. Tonti
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Wood, Herron & Evans, LLP
- 主分类号: H01L29/06
- IPC分类号: H01L29/06
摘要:
Device structure for active devices fabricated in a semiconductor-on-insulator (SOI) substrate and design structures for a radiofrequency integrated circuit. The device structure includes a first isolation region in the semiconductor layer that extends from a top surface of a semiconductor layer to a first depth, a second isolation region in the semiconductor layer that extends from the top surface of the semiconductor layer to a second depth greater than the first depth, and a first doped region in the semiconductor layer. The first doped region is disposed vertically between the first isolation region and an insulating layer disposed between the semiconductor layer and a handle wafer of the SOI substrate. The device structure may be included in a design structure embodied in a machine readable medium for designing, manufacturing, or testing an integrated circuit.
公开/授权文献
信息查询
IPC分类: