发明授权
- 专利标题: Microelectromechanical tunable inductor
- 专利标题(中): 微机电可调电感
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申请号: US11746147申请日: 2007-05-09
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公开(公告)号: US07710232B1公开(公告)日: 2010-05-04
- 发明人: Harold L. Stalford , Vincent M. Hietala , James G. Fleming
- 申请人: Harold L. Stalford , Vincent M. Hietala , James G. Fleming , Carol Fleming, legal representative
- 申请人地址: US NM Albuquerque
- 专利权人: Sandia Corporation
- 当前专利权人: Sandia Corporation
- 当前专利权人地址: US NM Albuquerque
- 代理商 John P. Hohimer
- 主分类号: H01F27/29
- IPC分类号: H01F27/29 ; H01F21/04 ; H01F5/00 ; H01H57/00 ; H02N1/00 ; H01G5/00
摘要:
A microelectromechanical tunable inductor is formed from a pair of substantially-identically-sized coils arranged side by side and coiled up about a central axis which is parallel to a supporting substrate. An in-plane stress gradient is responsible for coiling up the coils which. The inductance provided by the tunable inductor can be electrostatically changed either continuously or in discrete steps using electrodes on the substrate and on each coil. The tunable inductor can be formed with processes which are compatible with conventional IC fabrication so that, in some cases, the tunable inductor can be formed on a semiconductor substrate alongside or on top of an IC.
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