发明授权
US07717769B2 Manufacture of lapping board 有权
研磨板的制造

  • 专利标题: Manufacture of lapping board
  • 专利标题(中): 研磨板的制造
  • 申请号: US11948635
    申请日: 2007-11-30
  • 公开(公告)号: US07717769B2
    公开(公告)日: 2010-05-18
  • 发明人: Kazumasa Ohnishi
  • 申请人: Kazumasa Ohnishi
  • 代理机构: Nixon Peabody LLP
  • 代理商 Jeffrey L. Costellia
  • 优先权: JP2003-148163 20030526
  • 主分类号: B24B1/00
  • IPC分类号: B24B1/00
Manufacture of lapping board
摘要:
A method for manufacturing a lapping board having abrasive grains fixed on its surface, which is performed by the steps of: preparing a rotatable metal board having a surface of soft metal, an abrasive slurry-supplying tool arranged over the surface of the metal board, an abrasive-pressing tool which is placed on the metal board and has a hard surface, and a ultrasonic oscillation-generating tool attached to either or both of the abrasive-pressing tool and the metal board; rotating the metal board while supplying an abrasive slurry onto the surface of the metal board and while supplying electric power to the ultrasonic oscillation-generating tool to generate and apply ultrasonic oscillation to either or both of the abrasive-pressing tool and the metal board, whereby introducing the supplied abrasive slurry between the metal board and the abrasive-pressing tool and partly embedding some abrasive grains onto the metal board; and removing unfixed abrasive grains from the metal board.
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