发明授权
- 专利标题: Manufacture of lapping board
- 专利标题(中): 研磨板的制造
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申请号: US11948635申请日: 2007-11-30
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公开(公告)号: US07717769B2公开(公告)日: 2010-05-18
- 发明人: Kazumasa Ohnishi
- 申请人: Kazumasa Ohnishi
- 代理机构: Nixon Peabody LLP
- 代理商 Jeffrey L. Costellia
- 优先权: JP2003-148163 20030526
- 主分类号: B24B1/00
- IPC分类号: B24B1/00
摘要:
A method for manufacturing a lapping board having abrasive grains fixed on its surface, which is performed by the steps of: preparing a rotatable metal board having a surface of soft metal, an abrasive slurry-supplying tool arranged over the surface of the metal board, an abrasive-pressing tool which is placed on the metal board and has a hard surface, and a ultrasonic oscillation-generating tool attached to either or both of the abrasive-pressing tool and the metal board; rotating the metal board while supplying an abrasive slurry onto the surface of the metal board and while supplying electric power to the ultrasonic oscillation-generating tool to generate and apply ultrasonic oscillation to either or both of the abrasive-pressing tool and the metal board, whereby introducing the supplied abrasive slurry between the metal board and the abrasive-pressing tool and partly embedding some abrasive grains onto the metal board; and removing unfixed abrasive grains from the metal board.
公开/授权文献
- US20080287042A1 MANUFACTURE OF LAPPING BOARD 公开/授权日:2008-11-20
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