发明授权
US07718525B2 Metal interconnect forming methods and IC chip including metal interconnect
有权
金属互连形成方法和IC芯片包括金属互连
- 专利标题: Metal interconnect forming methods and IC chip including metal interconnect
- 专利标题(中): 金属互连形成方法和IC芯片包括金属互连
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申请号: US11770928申请日: 2007-06-29
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公开(公告)号: US07718525B2公开(公告)日: 2010-05-18
- 发明人: Karl W. Barth , Ramona Kei , Kaushik A. Kumar , Kevin S. Petrarca , Shahab Siddiqui
- 申请人: Karl W. Barth , Ramona Kei , Kaushik A. Kumar , Kevin S. Petrarca , Shahab Siddiqui
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Hoffman Warnick LLC
- 代理商 Katherine Brown
- 主分类号: H01L21/4763
- IPC分类号: H01L21/4763
摘要:
Methods of forming a metal interconnect and an IC chip including the metal interconnect are disclosed. One embodiment of the method may include providing an integrated circuit (IC) chip up to and including a middle of line (MOL) layer, the MOL layer including a contact positioned within a first dielectric; recessing the first dielectric such that the contact extends beyond an upper surface of the first dielectric; forming a second dielectric over the first dielectric such that the second dielectric surrounds at least a portion of the contact, the second dielectric having a lower dielectric constant than the first dielectric; forming a planarizing layer over the second dielectric; forming an opening through the planarizing layer and into the second dielectric to the contact; and forming a metal in the opening to form the metal interconnect.
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