发明授权
- 专利标题: Array substrates for use in liquid crystal displays and fabrication methods thereof
- 专利标题(中): 用于液晶显示器的阵列基板及其制造方法
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申请号: US11765528申请日: 2007-06-20
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公开(公告)号: US07718994B2公开(公告)日: 2010-05-18
- 发明人: Chun-Ju Huang
- 申请人: Chun-Ju Huang
- 申请人地址: TW Hsinchu
- 专利权人: AU Optronics Corp.
- 当前专利权人: AU Optronics Corp.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Thomas, Kayden, Horstemeyer & Risley
- 优先权: TW93134428A 20041111
- 主分类号: H01L31/00
- IPC分类号: H01L31/00 ; G02F1/1343
摘要:
Array substrates for use in TFT-LCDs and fabrication methods thereof. A transparent conductive layer, a first metal layer, a first insulating layer, a semiconductor layer, a second insulating layer and a sacrificial layer are sequentially formed on a substrate. With a first photomask, a photoresist layer with various thicknesses is formed on part of the sacrificial layer. Using the photoresist layer as an etching mask, a gate line having a gate, a channel layer on the gate, a gate pad at the end portion of the gate line, a pixel electrode and a source pad are defined. An insulating spacer is formed on the sidewalls of the gate and gate line. With a second photomask, a source line, source and drain are formed. The source pad connects the end portion of the source line. An array substrate is thus obtained with only two photomasks.
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