发明授权
US07718995B2 Nanowire, method for fabricating the same, and device having nanowires
有权
纳米线,其制造方法和具有纳米线的器件
- 专利标题: Nanowire, method for fabricating the same, and device having nanowires
- 专利标题(中): 纳米线,其制造方法和具有纳米线的器件
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申请号: US11812357申请日: 2007-06-18
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公开(公告)号: US07718995B2公开(公告)日: 2010-05-18
- 发明人: Takahiro Kawashima , Tohru Saitoh , Kenji Harada
- 申请人: Takahiro Kawashima , Tohru Saitoh , Kenji Harada
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2006-170395 20060620
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L31/0328 ; H01L31/0336 ; H01L31/072 ; H01L31/109
摘要:
A nanowire according to the present invention includes: a nanowire body made of a crystalline semiconductor as a first material; and a plurality of fine particles, which are made of a second material, including a constituent element of the semiconductor, and which are located on at least portions of the surface of the nanowire body. The surface of the nanowire body is smooth.
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