发明授权
- 专利标题: Devices having vertically-disposed nanofabric articles and methods of making the same
- 专利标题(中): 具有垂直布置的纳米制品的装置及其制造方法
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申请号: US11526364申请日: 2006-09-25
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公开(公告)号: US07719067B2公开(公告)日: 2010-05-18
- 发明人: Venkatachalam C. Jaiprakash , Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
- 申请人: Venkatachalam C. Jaiprakash , Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
- 申请人地址: US MA Woburn
- 专利权人: Nantero, Inc.
- 当前专利权人: Nantero, Inc.
- 当前专利权人地址: US MA Woburn
- 代理机构: Wilmer Cutler Pickering Hale and Dorr LLP
- 主分类号: H01L27/14
- IPC分类号: H01L27/14
摘要:
Electro-mechanical switches and memory cells using vertically-oriented nanofabric articles and methods of making the same. Under one aspect, a nanotube device includes a substantially horizontal substrate having a vertically oriented feature; and a nanotube film substantially conforming to a horizontal feature of the substrate and also to at least the vertically oriented feature. Under another aspect, an electromechanical device includes a structure having a major horizontal surface and a channel formed therein, the channel having first and second wall electrodes defining at least a portion of first and second vertical walls of the channel; first and second nanotube articles vertically suspended in the channel and in spaced relation to a corresponding first and second wall electrode, and electromechanically deflectable in a horizontal direction toward or away from the corresponding first and second wall electrode in response to electrical stimulation.
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