发明授权
- 专利标题: Reduced resistance thermal flow measurement device
- 专利标题(中): 降低电阻热流量测量装置
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申请号: US11814308申请日: 2006-02-20
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公开(公告)号: US07721599B2公开(公告)日: 2010-05-25
- 发明人: Masahiro Matsumoto , Hiroshi Nakano , Masamichi Yamada , Keiji Hanzawa , Izumi Watanabe , Keiichi Nakada , Yasuhiro Kanamaru
- 申请人: Masahiro Matsumoto , Hiroshi Nakano , Masamichi Yamada , Keiji Hanzawa , Izumi Watanabe , Keiichi Nakada , Yasuhiro Kanamaru
- 申请人地址: JP Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Mattingly & Malur, P.C.
- 优先权: JP2005-078382 20050318
- 国际申请: PCT/JP2006/302923 WO 20060220
- 国际公布: WO2006/100855 WO 20060928
- 主分类号: G01F1/68
- IPC分类号: G01F1/68
摘要:
Conventional thermal flow measurement devices lack consideration for automobiles in severe environments. A detection element of the thermal flow measurement device according to the present invention is structured by the provision of a planar substrate made of a material having good thermal conductivity, such as silicon or ceramic, with a thin-walled portion (diaphragm). On the surface of the thin-walled portion, the detection element comprises a heat element as a heater heated to a temperature being different to a predetermined extent from the temperature of the air flow to be measured, temperature-detecting resistors as temperature-detecting means on both sides of the heat element, wiring portions formed of electrical conductors that draw signal lines from the heat element and the temperature-detecting resistors and that have a melting point of 2000° C. or higher, and pads.
公开/授权文献
- US20090000372A1 Thermal Flow Measurement Device 公开/授权日:2009-01-01