发明授权
- 专利标题: Hollow cathode discharging apparatus
- 专利标题(中): 中空阴极排放装置
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申请号: US11700023申请日: 2007-01-31
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公开(公告)号: US07721673B2公开(公告)日: 2010-05-25
- 发明人: Chen-Chung Du , Ming-Tung Chiang , Fu-Ching Tung , Chin-Feng Cheng , Tean-Mu Shen
- 申请人: Chen-Chung Du , Ming-Tung Chiang , Fu-Ching Tung , Chin-Feng Cheng , Tean-Mu Shen
- 申请人地址: TW Hsinchu Hsien
- 专利权人: Industrial Technology Research Institute
- 当前专利权人: Industrial Technology Research Institute
- 当前专利权人地址: TW Hsinchu Hsien
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: TW95140689A 20061103
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; C23F1/00 ; H01L21/306
摘要:
The present invention provides a hollow cathode discharging apparatus including a hollow anode electrode, a hollow cathode electrode insulatedly fixed in the hollow anode electrode, a gas distribution pipe fixed in the hollow cathode electrode. The hollow anode electrode and the hollow cathode electrode are formed with anode openings and cathode openings respectively. Defined by the gas distribution pipe and the hollow cathode electrode and along the axis thereof is a spiral pathway winding through the cathode openings, so as to form a plurality of continuous and communicated reaction chambers. The gas distribution pipe is disposed with gas separation apertures communicated and adapted to introduce a reactive gas into the reaction chambers. The communicated reaction chambers enable uniform distribution of the reactive gas and thereby facilitate scale-up of the apparatus in axial. Accordingly, the present invention overcomes drawbacks of the prior art.
公开/授权文献
- US20080106202A1 Hollow cathode discharging apparatus 公开/授权日:2008-05-08
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