发明授权
- 专利标题: 2-axis driving electromagnetic scanner
- 专利标题(中): 2轴驱动电磁扫描仪
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申请号: US12045722申请日: 2008-03-11
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公开(公告)号: US07724411B2公开(公告)日: 2010-05-25
- 发明人: Young-chul Ko , Jun-o Kim , Jin-woo Cho , Hee-moon Jeong , Woo-hyek Choi
- 申请人: Young-chul Ko , Jun-o Kim , Jin-woo Cho , Hee-moon Jeong , Woo-hyek Choi
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Sughrue Mion, PLLC
- 优先权: KR10-2007-0096947 20070921
- 主分类号: G02B26/08
- IPC分类号: G02B26/08
摘要:
A 2-axis driving electromagnetic scanner, having a structure in which a mirror is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer driving unit which is capable of rotating around a first axis; an inner driving unit which is suspended from the outer driving unit so as to rotate around a second axis perpendicular to the first axis; and a stage which is located on an upper surface of the inner driving unit so as to rotate together with the inner driving unit. In the electromagnetic scanner, the stage is connected to the inner driving unit by a link unit protruding from a center of a lower surface of the stage.
公开/授权文献
- US20090080049A1 2-AXIS DRIVING ELECTROMAGNETIC SCANNER 公开/授权日:2009-03-26
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