发明授权
- 专利标题: Method and system for atmosphere recycling
- 专利标题(中): 大气回收方法与系统
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申请号: US11407058申请日: 2006-04-20
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公开(公告)号: US07727305B2公开(公告)日: 2010-06-01
- 发明人: Franklin D. Lomax, Jr. , Gregory S. Carr , Richard S. Todd
- 申请人: Franklin D. Lomax, Jr. , Gregory S. Carr , Richard S. Todd
- 申请人地址: US NJ Bloomfield
- 专利权人: Lummus Technology Inc.
- 当前专利权人: Lummus Technology Inc.
- 当前专利权人地址: US NJ Bloomfield
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 主分类号: B01D50/00
- IPC分类号: B01D50/00
摘要:
A system for recycling vented atmosphere gas discharged from a heat treatment chamber utilizing a protective atmosphere gas therein. The system includes an atmosphere recycling apparatus configured to receive the vented atmosphere gas. The atmosphere recycling apparatus includes a gas separator configured to separate the vented atmosphere gas into a purified atmosphere gas stream and an impure stream. The atmosphere recycling apparatus is configured to feed the purified atmosphere gas stream to the heat treatment chamber. A storage vessel can be provided to receive the purified atmosphere gas stream from the atmosphere recycling apparatus, and configured to supplement an atmosphere gas supply to the heat treatment chamber with the purified atmosphere gas stream.
公开/授权文献
- US20070245698A1 Method and system for atmosphere recycling 公开/授权日:2007-10-25
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