发明授权
US07728392B2 SRAM device structure including same band gap transistors having gate stacks with high-K dielectrics and same work function
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SRAM器件结构包括具有高K电介质栅极叠层和相同功能的相同带隙晶体管
- 专利标题: SRAM device structure including same band gap transistors having gate stacks with high-K dielectrics and same work function
- 专利标题(中): SRAM器件结构包括具有高K电介质栅极叠层和相同功能的相同带隙晶体管
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申请号: US11968898申请日: 2008-01-03
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公开(公告)号: US07728392B2公开(公告)日: 2010-06-01
- 发明人: Haining S. Yang , Robert C. Wong
- 申请人: Haining S. Yang , Robert C. Wong
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Joseph P. Abate
- 主分类号: H01L27/088
- IPC分类号: H01L27/088
摘要:
An SRAM semiconductor device includes: at least a first and a second field effect transistor formed on a same substrate, each of the transistors including a gate stack, each gate stack including a semiconductor layer disposed on a metal layer, the metal layer being disposed on a high-k dielectric layer located over a chemical region, wherein the metal layer of the first gate stack and the metal layer of the second gate stack have approximately a same work function, and wherein each channel region has approximately a same band gap.
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