发明授权
- 专利标题: Exposure apparatus, method of controlling the same, and manufacturing method
- 专利标题(中): 曝光装置及其控制方法以及制造方法
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申请号: US12099216申请日: 2008-04-08
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公开(公告)号: US07733498B2公开(公告)日: 2010-06-08
- 发明人: Yasutomo Kurono
- 申请人: Yasutomo Kurono
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon U.S.A., Inc., IP Division
- 优先权: JP2007-112296 20070420
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
An exposure apparatus comprises an optical system support supporting a projection optical system, a stage surface plate, first stage and second stages, a first interferometer configured to measure stage position in a first area, a second interferometer configured to measure stage position in a second area, a third interferometer which is interposed between the first interferometer and the second interferometer, a gap sensor configured to measure a gap between the optical system support and the stage surface plate, and a control unit configured to pass, in the swapping, the measurement result obtained by one of the first interferometer and the second interferometer to the other one of the first interferometer and the second interferometer using the measurement result obtained by the third interferometer, and to correct the passed measurement result based on the measurement result obtained by the gap sensor.
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