发明授权
US07733504B2 Shape evaluation method, shape evaluation device, and device having the shape evaluation device
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形状评价方法,形状评价装置以及具有形状评价装置的装置
- 专利标题: Shape evaluation method, shape evaluation device, and device having the shape evaluation device
- 专利标题(中): 形状评价方法,形状评价装置以及具有形状评价装置的装置
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申请号: US11794718申请日: 2005-12-06
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公开(公告)号: US07733504B2公开(公告)日: 2010-06-08
- 发明人: Takashi Maekawa , Yoh Nishimura , Takayuki Sasaki , Yuu Nishiyama
- 申请人: Takashi Maekawa , Yoh Nishimura , Takayuki Sasaki , Yuu Nishiyama
- 申请人地址: JP Yokohama-Shi
- 专利权人: National University Corporation Yokohama National University
- 当前专利权人: National University Corporation Yokohama National University
- 当前专利权人地址: JP Yokohama-Shi
- 代理机构: Westerman, Hattori, Daniels & Adrian, LLP
- 优先权: JP2005-003242 20050107; JP2005-254169 20050901
- 国际申请: PCT/JP2005/022356 WO 20051206
- 国际公布: WO2006/073036 WO 20060713
- 主分类号: G01B11/24
- IPC分类号: G01B11/24
摘要:
A shape evaluation device performs simulation by using an annular light source or concentric light source instead of a rectilinear light source and calculates a characteristic line for performing shape evaluation. The shape evaluation device includes a calculation device (2) having: a distance vector calculation unit (2a) for acquiring a distance vector representing a distance between the circle and the vector, a distance function unit (2b) for acquiring a distance function from the distance vector, and a distance function calculation unit (2c) for acquiring a point on a curved surface where the value of the distance function is a predetermined value. By performing simulation using the annular or concentric light source, it is possible to obtain a characteristic line capable of observing distortion in all the directions by one calculation. The present invention reduces the number of calculations required for calculating the characteristic line for performing shape evaluation and reduce the time required for calculation, thereby enabling evaluation by a dynamic shape.
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