发明授权
- 专利标题: Method and device for electrostatic fixing of substrates with polarized molecules
- 专利标题(中): 用极化分子静电固定底物的方法和装置
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申请号: US12089972申请日: 2007-03-22
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公开(公告)号: US07733624B2公开(公告)日: 2010-06-08
- 发明人: Christof Landesberger
- 申请人: Christof Landesberger
- 申请人地址: DE Munich
- 专利权人: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- 当前专利权人: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- 当前专利权人地址: DE Munich
- 代理机构: Keating & Bennett, LLP
- 优先权: DE102006013517 20060323
- 国际申请: PCT/EP2007/002555 WO 20070322
- 国际公布: WO2007/110192 WO 20071004
- 主分类号: H01T23/0012
- IPC分类号: H01T23/0012
摘要:
Method for handling a substrate with polarizable molecules including providing a carrier with a first junction electrode and disposing the substrate between the first junction electrode and a second junction electrode. Fixing the substrate on the carrier is achieved by applying a voltage between the first junction electrode and the second junction electrode, so that the polarizable molecules are polarized. After removing the second junction electrode, the substrate remains fixed on the carrier.
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