发明授权
- 专利标题: Resistance measurements of a helical coil
- 专利标题(中): 螺旋线圈的电阻测量
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申请号: US11957484申请日: 2007-12-17
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公开(公告)号: US07741133B2公开(公告)日: 2010-06-22
- 发明人: Edward Hin Pong Lee , Jennifer Ai-Ming Leung
- 申请人: Edward Hin Pong Lee , Jennifer Ai-Ming Leung
- 申请人地址: NL Amsterdam
- 专利权人: Hitachi Global Storage Technologies Netherlands, B.V.
- 当前专利权人: Hitachi Global Storage Technologies Netherlands, B.V.
- 当前专利权人地址: NL Amsterdam
- 代理机构: Duft Bornsen & Fishman, LLP
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01F30/12 ; G01R1/00
摘要:
Test methods and components are disclosed for testing resistances of helical coils formed in magnetic recording heads. Helical coils in magnetic recording heads include a bottom coil structure, a top coil structure, and connecting structures that electrically connect the top and bottom coil structures. A test component is fabricated on the wafer along with the magnetic recording heads. The test component includes a bottom coil structure connected in series, and includes a top coil structure connected in series which is electrically disconnected from the bottom coil structure. Resistances of the top and bottom coil structures are measured in the test component. A total resistance of a helical coil is also measured. The resistance of the connecting structures in the helical coil may then be determined based on the resistance of the bottom coil structure, the resistance of the top coil structure, and the total resistance of the helical coil.
公开/授权文献
- US20090153157A1 RESISTANCE MEASUREMENTS OF A HELICAL COIL 公开/授权日:2009-06-18
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