发明授权
- 专利标题： Method for making transmission electron microscope grid
- 专利标题（中）： 制造透射电子显微镜网格的方法
-
申请号： US12339337申请日： 2008-12-19
-
公开(公告)号： US07745302B2公开(公告)日： 2010-06-29
- 发明人: Li-Na Zhang , Zhuo Chen , Chen Feng , Liang Liu , Kai-Li Jiang , Qun-Qing Li , Shou-Shan Fan
- 申请人： Li-Na Zhang , Zhuo Chen , Chen Feng , Liang Liu , Kai-Li Jiang , Qun-Qing Li , Shou-Shan Fan
- 申请人地址： CN Beijing TW Tu-Cheng, Taipei Hsien
- 专利权人： Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- 当前专利权人： Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- 当前专利权人地址： CN Beijing TW Tu-Cheng, Taipei Hsien
- 代理商 D. Austin Bonderer
- 优先权： CN200810067934 20080620
- 主分类号： H01L21/76
- IPC分类号： H01L21/76
摘要：
A method for making transmission electron microscope gird is provided. An array of carbon nanotubes is provided and drawing a carbon nanotube film from the array of carbon nanotubes. A substrate has a plurality of spaced metal girds attached on the substrate. The metal girds are covered with the carbon nanotube film and treating the carbon nanotube film and the metal girds with organic solvent. A transmission electron microscope (TEM) grid is obtained by removing remaining CNT film.
公开/授权文献
- US20090317926A1 METHOD FOR MAKING TRANSMISSION ELECTRON MICROSCOPE GRID 公开/授权日：2009-12-24
信息查询
IPC分类:
