发明授权
US07749448B2 Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal 有权
用于采用压力金属的液体拾取,运输和分配的毛细管通道探头

Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal
摘要:
Fluidic conduits, which can be used in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems, are disclosed that use channel spring probes that include at least one capillary channel. Formed from spring beams (e.g., stressy metal beams) that curve away from the substrate when released, channels can either be integrated into the spring beams or formed on the spring beams. Capillary forces produced by the narrow channels allow liquid to be gathered, held, and dispensed by the channel spring probes. Because the channel spring beams can be produced using conventional semiconductor processes, significant design flexibility and cost efficiencies can be achieved.
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