发明授权
- 专利标题: Sensor and method of manufacturing the same
- 专利标题(中): 传感器及其制造方法
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申请号: US12608979申请日: 2009-10-29
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公开(公告)号: US07749791B2公开(公告)日: 2010-07-06
- 发明人: Yohei Ishida , Hirokatsu Miyata
- 申请人: Yohei Ishida , Hirokatsu Miyata
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2004-329046 20041112; JP2004-376368 20041227; JP2005-167114 20050607
- 主分类号: H01L21/02
- IPC分类号: H01L21/02
摘要:
A sensor comprising a semiconductor film having a plurality of mesopores and containing an oxide, and electrodes electrically connected to the semiconductor film, wherein at least part of surfaces in the mesopores is coated with an organic material.
公开/授权文献
- US20100047948A1 SENSOR AND METHOD OF MANUFACTURING THE SAME 公开/授权日:2010-02-25
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