发明授权
- 专利标题: Phase change memory device using carbon nanotube and method for fabricating the same
- 专利标题(中): 使用碳纳米管的相变存储器件及其制造方法
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申请号: US11610341申请日: 2006-12-13
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公开(公告)号: US07749801B2公开(公告)日: 2010-07-06
- 发明人: Yang-Kyu Choi , Kuk-Hwan Kim
- 申请人: Yang-Kyu Choi , Kuk-Hwan Kim
- 申请人地址: KR Daejeon
- 专利权人: Korea Advanced Institute of Science & Technology
- 当前专利权人: Korea Advanced Institute of Science & Technology
- 当前专利权人地址: KR Daejeon
- 代理机构: Foley & Lardner LLP
- 优先权: KR10-2006-0001336 20060105
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Provided are a phase change memory device that can operate at low power and improve the scale of integration by reducing a contact area between a phase change material and a bottom electrode, and a method for fabricating the same. The phase change memory comprises a current source electrode, a phase change material layer, a plurality of carbon nanotube electrodes, and an insulation layer. The current source electrode supplies external current to a target. The phase change material layer is disposed to face the current source electrode in side direction. The carbon nanotube electrodes are disposed between the current source electrode and the phase change material layer. The insulation layer is formed outside the carbon nanotube electrodes and functions to reduce the loss of heat generated at the carbon nanotube electrodes.
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