发明授权
US07750336B2 Resistive memory devices and methods of forming resistive memory devices
有权
电阻式存储器件和形成电阻式存储器件的方法
- 专利标题: Resistive memory devices and methods of forming resistive memory devices
- 专利标题(中): 电阻式存储器件和形成电阻式存储器件的方法
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申请号: US12207889申请日: 2008-09-10
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公开(公告)号: US07750336B2公开(公告)日: 2010-07-06
- 发明人: Jang-Eun Lee , Dae-Kyom Kim , Jun-Ho Jeong , Se-Chung Oh , Kyung-Tae Nam , Hyun-Jun Sim
- 申请人: Jang-Eun Lee , Dae-Kyom Kim , Jun-Ho Jeong , Se-Chung Oh , Kyung-Tae Nam , Hyun-Jun Sim
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec
- 优先权: KR10-2007-0091660 20070910
- 主分类号: H01L47/00
- IPC分类号: H01L47/00
摘要:
Methods of forming a resistive memory device include forming an insulation layer on a semiconductor substrate including a conductive pattern, forming a contact hole in the insulation layer to expose the conductive pattern, forming a lower electrode in the contact hole, forming a variable resistive oxide layer in the contact hole on the lower electrode, forming a middle electrode in the contact hole on the variable resistive oxide layer, forming a buffer oxide layer on the middle electrode and the insulation layer, and forming an upper electrode on the buffer oxide layer. Related resistive memory devices are also disclosed.
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