发明授权
- 专利标题: Solid-state imaging element and method for manufacturing the same
- 专利标题(中): 固态成像元件及其制造方法
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申请号: US12180920申请日: 2008-07-28
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公开(公告)号: US07750366B2公开(公告)日: 2010-07-06
- 发明人: Toru Okino , Mitsuyoshi Mori
- 申请人: Toru Okino , Mitsuyoshi Mori
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2007-208903 20070810
- 主分类号: H01L31/0336
- IPC分类号: H01L31/0336 ; H01L31/109 ; H01L31/072 ; H01L31/0328 ; H01L31/113 ; H01L31/062 ; H01L21/324
摘要:
A solid-state imaging element includes a layered substrate made of silicon and composed of, for example, an N-type substrate, a P-type layer, and an N-type layer. In the layered substrate, an imaging region in which a plurality of pixels are arranged and a peripheral circuit region are formed. A recess reaching the reverse face of the P-type layer is formed in a reverse face portion of the layered substrate in the imaging region, and a reflective film is formed on at least the inner face of the recess. Light is reflected on the reverse face and the obverse face of the layered substrate.
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