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US07750627B2 Magnetic film sensor having a magnetic film for generating a magnetostriction and a depressed insulating layer 有权
具有用于产生磁致伸缩的磁性膜和凹陷绝缘层的磁性膜传感器

Magnetic film sensor having a magnetic film for generating a magnetostriction and a depressed insulating layer
摘要:
A magnetic film sensor comprises a magnetic film for generating a magnetostriction, and a magnetostrictive structure for generating a magnetostriction in the magnetic film. The magnetostrictive structure is constructed so as to generate a magnetostriction by curving the magnetic film, for example. The magnetostrictive structure is obtained, for example, by providing a depressed insulating layer having a surface formed with a depression and forming the magnetic film across the depression.
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