发明授权
- 专利标题: Optical flying height measurement and calibration with dual sliders
- 专利标题(中): 光学飞行高度测量和双滑块校准
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申请号: US12097224申请日: 2006-12-12
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公开(公告)号: US07751062B2公开(公告)日: 2010-07-06
- 发明人: Bo Liu , Zhimin Yuan , Ka Wei Ng
- 申请人: Bo Liu , Zhimin Yuan , Ka Wei Ng
- 申请人地址: SG Centro
- 专利权人: Agency for Science, Technology and Research
- 当前专利权人: Agency for Science, Technology and Research
- 当前专利权人地址: SG Centro
- 代理机构: Greenberg Traurig, LLP
- 代理商 Franklin D. Ubell
- 国际申请: PCT/SG2006/000387 WO 20061212
- 国际公布: WO2007/070015 WO 20070621
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
A method for optical flying height measurement, and a flying height tester. The method the method comprises the steps of aligning a first slider and a second slider adjacent a transparent disk; varying a rotational speed of the disk relative to the first slider whereby a spacing between the first slider and the disk changes; measuring changes in a first reflected light intensity caused by interference of a light signal portion reflected from the first slider and a light signal portion reflected from a surface of the disk, wherein the rotational speed is varied over a range such that one maximum and minimum intensities pair is measured in the reflected light intensity; measuring a second reflected light intensity caused by interference of a light signal portion reflected from the second slider and a light signal portion reflected from a surface of the disk at a fixed rotational speed between the disk and the second slider; and calculate a flying height of the second slider using the measured maximum and minimum intensities pair and the measured second reflected light intensity.
公开/授权文献
- US20090323079A1 METHOD AND TESTER FOR OPTICAL FLYING HEIGHT MEASUREMENT 公开/授权日:2009-12-31
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