发明授权
US07759800B2 Microelectronics devices, having vias, and packaged microelectronic devices having vias
有权
具有通孔的微电子器件和具有通孔的封装的微电子器件
- 专利标题: Microelectronics devices, having vias, and packaged microelectronic devices having vias
- 专利标题(中): 具有通孔的微电子器件和具有通孔的封装的微电子器件
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申请号: US11430735申请日: 2006-05-09
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公开(公告)号: US07759800B2公开(公告)日: 2010-07-20
- 发明人: Sidney B. Rigg , Charles M. Watkins , Kyle K. Kirby , Peter A. Benson , Salman Akram
- 申请人: Sidney B. Rigg , Charles M. Watkins , Kyle K. Kirby , Peter A. Benson , Salman Akram
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Perkins Coie LLP
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L23/52 ; H01L29/40
摘要:
Microelectronic devices, methods for packaging microelectronic devices, and methods for forming vias and conductive interconnects in microfeature workpieces and dies are disclosed herein. In one embodiment, a method includes forming a bond-pad on a die having an integrated circuit, the bond-pad being electrically coupled to the integrated circuit. A conductive line is then formed on the die, the conductive line having a first end portion attached to the bond-pad and a second end portion spaced apart from the bond-pad. The method can further include forming a via or passage through the die, the bond-pad, and the first end portion of the conductive line, and depositing an electrically conductive material in at least a portion of the passage to form a conductive interconnect extending at least generally through the microelectronic device.
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