发明授权
US07763396B2 Method and apparatus for fabricating semiconductor chips using varying areas of precision 有权
使用不同精度的区域制造半导体芯片的方法和装置

Method and apparatus for fabricating semiconductor chips using varying areas of precision
摘要:
A system that fabricates a semiconductor chip. The system places patterns for components which require fine line-widths within a high resolution region of a reticle, wherein the high resolution region provides sharp focus for a given wavelength of light used by the lithography system. At the same time, the system places patterns for components which do not require fine line-widths outside of the high-resolution region of the reticle, thereby utilizing the region outside of the high-resolution region of the reticle instead of avoiding the region. Note that the coarseness for components placed outside of the high resolution region of the reticle is increased to compensate for the loss of optical focus outside of the high resolution region.
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