发明授权
- 专利标题: System and method for sensing position utilizing an uncalibrated surface
- 专利标题(中): 使用未校准表面感测位置的系统和方法
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申请号: US11517862申请日: 2006-09-07
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公开(公告)号: US07763875B2公开(公告)日: 2010-07-27
- 发明人: Nikolai L. Romanov , Dmitri A. Kossakovski
- 申请人: Nikolai L. Romanov , Dmitri A. Kossakovski
- 代理机构: Intellectual Property Technology Law
- 代理商 Vincent K. Gustafson
- 主分类号: G01N21/86
- IPC分类号: G01N21/86 ; H01L27/00
摘要:
Systems and methods adapted for use with uncalibrated patterned surfaces for sensing any of position, displacement, velocity, acceleration, area, and volume are provided. A system includes a memory, processing electronics, and at least one readhead adapted to move relative to the surface and including a radiation source, lens, and an optical array transducer. One aspect includes generating a mapping data set representative of an intensity map of the patterned surface. Another aspect provides a variable travel speed readhead. Other aspects include multiple readheads adapted to travel in concert. Incremental and absolute sensing are provided, including systems having sub-pixel spatial resolution.
公开/授权文献
- US20070051884A1 Positional sensing system and method 公开/授权日:2007-03-08
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