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US07765659B2 Method of manufacturing a liquid ejection head 失效
液体喷射头的制造方法

Method of manufacturing a liquid ejection head
Abstract:
A method of manufacturing a liquid ejection head includes a pressure chamber forming step of forming at least one of recess sections and through holes corresponding at least to the pressure chambers, in a plurality of calcined bodies obtained by calcining a plurality of ceramic green sheets; a piezoelectric body forming step of forming a plurality of films of piezoelectric bodies which constitute the piezoelectric elements by means of an aerosol deposition method, onto the calcined body corresponding to the diaphragm, of the plurality of calcined bodies; a laminating step of forming glass layers onto surfaces of the calcined bodies and arranging the calcined bodies to overlap each other; and a heating step of heating the arranged calcined bodies to a prescribed temperature, and simultaneously performing glass bonding of the calcined bodies and annealing of the piezoelectric bodies.
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